CAS No.: 999-97-3
Product name: Hexamethyldisilazane
Abbreviation: HMDS
Appearance: Colorless transparent liquid
Purity(HPLC): ≥99%
Molecular formula: C6H19NSi2
Molecular weight: 161.39
Package: In fluoride bottle/fluoride drums/plastic drums/lBC Tank, etc.
Storage: Preserve in a well-closed container and keep in cool, dry place, avoid light.
Hexamethyldisilazane is a colorless liquid with a strong ammonia odor. It is basic and can react with acids to form salts. It can also undergo nucleophilic substitution reactions and can participate in electrophilic substitution reactions. It is a relatively stable compound and can be stored at room temperature. It is sensitive to oxygen and water and is susceptible to oxidation and hydrolysis.
Hexamethyldisilazane is most commonly used as a primer layer to increase the adhesion of photoresist on pinwheel surfaces.
It is also widely used in the field of organic synthesis, and can be used as an alkali catalyst, an intermediate in organic synthesis and a reaction aid.
Hexamethyldisilazane can also be used as a protective group for organosilicon compounds, playing the role of protecting load and protecting functional groups in the synthesis.