Heynova (Shanghai) New Material Technology CO., Ltd.
Heynova (Shanghai) New Material Technology CO., Ltd.
Hexamethyldisilazane (HMDS) 999-97-3 C6H19NSi2

Hexamethyldisilazane (HMDS) 999-97-3 C6H19NSi2

CAS No.: 999-97-3

Product name: Hexamethyldisilazane

Abbreviation: HMDS

Appearance: Colorless transparent liquid

Purity(HPLC): ≥99%

Molecular formula: C6H19NSi2

Molecular weight: 161.39

Package: In fluoride bottle/fluoride drums/plastic drums/lBC Tank, etc.

Storage: Preserve in a well-closed container and keep in cool, dry place, avoid light.

Hexamethyldisilazane (HMDS) 999-97-3 C6H19NSi2

Introduction of Hexamethyldisilazane (HMDS) 999-97-3 C6H19NSi2


Hexamethyldisilazane is a colorless liquid with a strong ammonia odor. It is basic and can react with acids to form salts. It can also undergo nucleophilic substitution reactions and can participate in electrophilic substitution reactions. It is a relatively stable compound and can be stored at room temperature. It is sensitive to oxygen and water and is susceptible to oxidation and hydrolysis.

Application of Hexamethyldisilazane (HMDS) 999-97-3 C6H19NSi2


  • Hexamethyldisilazane is most commonly used as a primer layer to increase the adhesion of photoresist on pinwheel surfaces.


  • It is also widely used in the field of organic synthesis, and can be used as an alkali catalyst, an intermediate in organic synthesis and a reaction aid.


  • Hexamethyldisilazane can also be used as a protective group for organosilicon compounds, playing the role of protecting load and protecting functional groups in the synthesis.

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Hexamethyldisilazane (HMDS) 999-97-3 C6H19NSi2
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